Overview
This course will introduce participants to the fundamentals of vacuum technologies and develop knowledge on essential concepts in thin film deposition techniques. It will provide a foundation in microfabrication methods, such as photolithography and ion milling, essential for advanced research and thin film device manufacturing.
Participants will gain theoretical knowledge and develop practical experience, preparing them for work in research and manufacturing environments. The course content will also raise awareness of the state-of-the-art equipment available at the Royce Thin Film Device Materials (TFDM) Facility at Imperial College London, and supporting capability and expertise across the Royce Partners.
Format: In-person
Cost: £200
Location: Royce@Imperial, Michael Uren Building, White City Campus, Imperial College London
Includes: 3x nights, lunches, 2x evening meals
Background and motivation
The growth of thin films often forms the basis for device fabrication and is an important part of many technologies, including computing and communications hardware. These technologies, the means of their manufacture, as well as sustainability and critical infrastructure requirements call for advanced technical skills in both research and industry.
Thermal evaporation, magnetron sputtering and pulsed laser deposition (PLD) are suited to research and development of new materials systems; while photolithography and ion milling are processes used widely across research and industry for micro- and nano structuring and device fabrication. Whilst the techniques covered are based on the equipment available at the Royce TFDM Facility, the concepts are relevant to many thin film manufacturing approaches.
Audience
The course is applicable to researchers seeking to gain practical experience in the growth, structuring and characterisation of thin films. The content will be suitable to those approaching thin film technology for the first time or those wanting to expand their existing knowledge and learn about new techniques.
Participants might include PhD students or postdoctoral researchers, established researchers in academia or industry, as well as technicians, experimental officers, and engineers who are new to the field or wanting to retrain to work in deposition facilities.
Priority will be given to applicants outside of London, and without existing links to Imperial or the TFDM facility. If you are a student at Imperial College London, please contact the Royce team to make alternative training arrangements.
Learning outcomes
After this course participants should be able to:
- Explain the principles of vacuum production and its classification
- Detail the processes involved in physical vapour deposition techniques
- Apply appropriate methods and parameters in deposition experiments
- Select appropriate methods for thin-film characterisation
- Conduct simple thin film patterning procedures using photolithography and ion milling methods
- Undertake best practice when working in an advanced fabrication or industrial cleanroom environment
Programme
Organisers
- Peter Petrov, Imperial College London
- Philippa Shepley, University of Leeds
Trainers
- Peter Petrov, Imperial College London
- Philippa Shepley, University of Leeds
- Bruno Rente, Imperial College London
- Abul Hasnath, Imperial College London
- Ryan Bower, Imperial College London
