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Leeds University Nanotechnology Cleanroom
The Leeds Nanotechnology Cleanroom’s mission is to be a leading fabrication centre, supporting cutting edge research activities across the physical and life sciences. The facility includes 200 m2 of ISO 5 (class 100) cleanroom containing a range of state-of-the art equipment to suit most micro- and nano-fabrication requirements, including photo- and e-beam lithography, deposition, wet and dry etching, post-processing and characterisation. The cleanroom facilities are supported by a suite of peripheral ‘back end’ laboratories for post-processing activities including wafer sawing, scribing, wire bonding, and electrical characterisation.
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Leeds University Nanotechnology Cleanroom
The Leeds Nanotechnology Cleanroom’s mission is to be a leading fabrication centre, supporting cutting edge research activities across the physical and life sciences. The facility includes 200 m2 of ISO 5 (class 100) cleanroom containing a range of state-of-the art equipment to suit most micro- and nano-fabrication requirements, including photo- and e-beam lithography, deposition, wet and dry etching, post-processing and characterisation. The cleanroom facilities are supported by a suite of peripheral ‘back end’ laboratories for post-processing activities including wafer sawing, scribing, wire bonding, and electrical characterisation.