Dual Beam FIB with Cryo-Stage

This is a dual beam FIB to allow sample preparation and analysis of thin films. This includes TEM prep, slice and view tomography and cross-sectional imaging. The instrument is equipped with a cold stage so analysis of beam sensitive samples is also possible. The system is equipped with a range of detects including backscatter, secondary electron, STEM and Cathodoluminescence.

the innovative NICol electron column provides the foundation of the system’s high-resolution imaging and detection capabilities. It offers excellent nanoscale details, with a wide range of working conditions, whether operating at 30 keV in STEM mode (to access structural information) or at lower energies (to obtain charge-free, detailed surface information).

With its unique in-lens Thermo Scientific Trinity Detection System, the Scios 2 DualBeam is designed to simultaneously acquire angular and energy-selective secondary electron (SE) and BSE imaging. Fast access to detailed nanoscale information is possible not only top-down but also on tilted specimens or cross-sections.

Optional below-the-lens detectors and an electron-beam-deceleration mode ensure quick and easy simultaneous collection of all signals, revealing the minor features in a material surface or cross-section. Fast, accurate, and reproducible results are obtained thanks to the unique NICol column design with full auto alignments.