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A FIB-SEM system featuring the Zeiss Capella FIB column and Gemini II SEM column.
- Partner:University of Oxford
- Facility:David Cockayne Centre for Electron Microscopy
- Availability:Available
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Detailed Description
Optimised for nanofabrication, three-dimensional data-sets containing imaging, chemical and crystallographic information can be created from serial cross sectional imaging on this instrument, using the advanced Zeiss Atlas 5 imaging and patterning engine. An Oxford Instruments XMaxN 150 EDX detector and Nordlys Max EBSD system is fitted for analytical work.