Helios NanoLab 600 FIB

Focused Ion Beam

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Focused Ion Beam (FIB)
Atoms to Devices

The Helios NanoLab 600 Focused Ion Beam (FIB) system uses a Ga+ ion beam to raster over the surface of a sample in a similar way as the electron beam in a scanning electron microscope (SEM). The ion beam allows the milling of small holes in the sample at well localised sites, so that cross-sectional images of the structure can be obtained or that modifications in the structures can be made. It allows non-destructive imaging at higher magnifications and with better image resolution, and also more accurate control of the progress of the milling.


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